화학공학소재연구정보센터
Thin Solid Films, Vol.383, No.1-2, 57-60, 2001
Electronic and topographic properties of amorphous and microcrystalline silicon thin films
Electronic properties of microcrystalline silicon (muc-Si) thin films prepared by different techniques are presented and compared to that of device-grade, undoped, hydrogenated amorphous silicon (a-Si:H). It is found that whatever the preparation technique, the conductivity of muc-Si is significantly larger and the mobility-lifetime products and ambipolar diffusion lengths of optimised layers can be higher than in a-Si:H. Tn addition, no light-induced degradation of electronic properties is observed. Local topographic and electrical probing results on muc-Si films are also shown. The surface roughness of muc-Si samples depends on the preparation technique, but a common aging phenomenon in the local electrical probing is found and described.