Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.1, 63-66, 1995 DOI10.1116/1.579444 Export Citation Dry-Etching of Palladium Thin-Films in Fluorine-Containing Plasmas - X-Ray Photoelectron-Spectroscopy Investigation Fracassi F, Dagostino R, Cacucci A Please enable JavaScript to view the comments powered by Disqus.
