검색결과 : 8건
No. | Article |
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1 |
Data bases for modeling plasma devices for processing of integrated circuits Nikitovic Z, Sasic O, Petrovic ZL, Malovic G, Strinic A, Dujko S, Raspopovic Z, Radmilovic-Radjenovic M Materials Science Forum, 453-454, 15, 2004 |
2 |
Deposition of diamond-like carbon film in a closed-space CH4 RF plasma Mutsukura N, Handa Y Plasma Chemistry and Plasma Processing, 22(4), 607, 2002 |
3 |
Solar cells prepared on multicrystalline silicon subjected to new gettering and passivation treatments Litovchenko VG, Klyuis NI, Evtukh AA, Efremov AA, Sarikov AV, Popov VG, Kostylyov VP, Rasamakin YV, Haessler C, Koch W Solar Energy Materials and Solar Cells, 72(1-4), 343, 2002 |
4 |
Laser deposition of diamond-like films from liquid aromatic hydrocarbons Simakin AV, Shafeev GA, Loubnin EN Applied Surface Science, 154, 405, 2000 |
5 |
Amorphous hydrogenated carbon film formation from benzene by electron cyclotron resonance chemical vapor deposition Chen XH, Ning ZY, Hess DW, Tolbert LM Journal of Vacuum Science & Technology A, 18(1), 68, 2000 |
6 |
In-Situ Monitoring and Characterization of SiC Interface Formed in Carbon-Films Grown by Pulsed-Laser Deposition Samano EC, Soto G, Valenzuela J, Cota L Journal of Vacuum Science & Technology A, 15(5), 2585, 1997 |
7 |
Carbon Nucleation on Si(100) Using a Negative Carbon Ion-Beam Ko YW, Kim SI Journal of Vacuum Science & Technology A, 15(5), 2750, 1997 |
8 |
Properties of Molecular Organo-Silicate Composites Submitted to Ion Irradiations Pivin JC, Brusatin G, Zalczer G Thin Solid Films, 287(1-2), 65, 1996 |