검색결과 : 10건
| No. | Article |
|---|---|
| 1 |
Novel photocurable epoxy siloxane polymers for photolithography and imprint lithography applications Wang PI, Nalamasu O, Ghoshal R, Schaper CD, Li A, Lu TM Journal of Vacuum Science & Technology B, 26(1), 244, 2008 |
| 2 |
Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing Tay A, Ho WK, Schaper CD, Lee LL Journal of Process Control, 14(1), 31, 2004 |
| 3 |
Polyvinyl alcohol templates for low cost, high resolution, complex printing Schaper CD, Miahnahri A Journal of Vacuum Science & Technology B, 22(6), 3323, 2004 |
| 4 |
Planarizing surface topography by polymer adhesion to water-soluble templates with replicated null pattern Schaper CD Langmuir, 20(1), 227, 2004 |
| 5 |
Temperature cycling and control system for photosensitive materials processing El-Awady K, Schaper CD, Kailath T Journal of Vacuum Science & Technology B, 21(4), 1459, 2003 |
| 6 |
Molecular transfer lithography for pseudomaskless high-throughput aligned nanolithography Schaper CD Journal of Vacuum Science & Technology B, 21(6), 2961, 2003 |
| 7 |
Control of spatial and transient temperature trajectories for photoresist processing El-Awady K, Schaper CD, Kailath T Journal of Vacuum Science & Technology B, 17(5), 2109, 1999 |
| 8 |
Pattern-Recognition of Trench Width Using a Confocal Microscope Wang YT, Schaper CD, Kailath T Journal of Vacuum Science & Technology B, 13(3), 840, 1995 |
| 9 |
Identification of Chemical Processes Using Canonical Variate Analysis Schaper CD, Larimore WE, Seborg DE, Mellichamp DA Computers & Chemical Engineering, 18(1), 55, 1994 |
| 10 |
Modeling, Identification, and Control of Rapid Thermal-Processing Systems Schaper CD, Moslehi MM, Saraswat KC, Kailath T Journal of the Electrochemical Society, 141(11), 3200, 1994 |