검색결과 : 10건
| No. | Article |
|---|---|
| 1 |
Design considerations for numaturized PEM fuel cells Meyers JP, Maynard HL Journal of Power Sources, 109(1), 76, 2002 |
| 2 |
Thin-film resistor fabrication for InP technology applications Kopf RF, Melendes R, Jacobson DC, Tate A, Melendes MA, Reyes RR, Hamm RA, Yang Y, Frackoviak J, Weimann NG, Maynard HL, Liu CT Journal of Vacuum Science & Technology B, 20(3), 871, 2002 |
| 3 |
Miniature fuel cells for portable power: Design considerations and challenges Maynard HL, Meyers JP Journal of Vacuum Science & Technology B, 20(4), 1287, 2002 |
| 4 |
Plasma etching of submicron devices : in situ monitoring and control by multi-wavelength ellipsometry Maynard HL, Layadi N, Lee JTC Thin Solid Films, 313-314, 398, 1998 |
| 5 |
Multiwavelength Ellipsometry for Real-Time Process-Control of the Plasma-Etching of Patterned Samples Maynard HL, Layadi N, Lee JT Journal of Vacuum Science & Technology B, 15(1), 109, 1997 |
| 6 |
Polycide Gate Etching Using a Helical Resonator on an Applied Materials Precision-5000 Platform Chang CP, Klemens FP, Maynard HL, Lee TC, Kornblit A, Ibbotson DE Journal of Vacuum Science & Technology B, 15(3), 646, 1997 |
| 7 |
Plasma-Etching Endpointing by Monitoring Radiofrequency Power-Systems with an Artificial Neural-Network Maynard HL, Rietman EA, Lee JT, Ibbotson DE Journal of the Electrochemical Society, 143(6), 2029, 1996 |
| 8 |
Comparison of Advanced Plasma Sources for Etching Applications .5. Polysilicon Etching Rate, Uniformity, Profile Control, and Bulk Plasma Properties in a Helical Resonator Plasma Source Lee JT, Layadi N, Guinn KV, Maynard HL, Klemens FP, Ibbotson DE, Tepermeister I, Egan PO, Richardson RA Journal of Vacuum Science & Technology B, 14(4), 2510, 1996 |
| 9 |
Metal Stack Etching Using a Helical Resonator Plasma Labelle CB, Maynard HL, Lee JT Journal of Vacuum Science & Technology B, 14(4), 2574, 1996 |
| 10 |
Thin-Film Interferometry of Patterned Surfaces Maynard HL, Hershkowitz N Journal of Vacuum Science & Technology B, 13(3), 848, 1995 |