검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Plasma-Assisted Dry-Etching of Cobalt Silicide for Microelectronics Applications Fracassi F, Dagostino R, Lamendola R, Filippo A, Rapisarda C, Vasquez P Journal of the Electrochemical Society, 143(2), 701, 1996 |
| 2 |
Deposition of Gold-Containing Siloxane Thin-Films Fracassi F, Dagostino R, Palumbo F, Bellucci F, Monetta T Thin Solid Films, 272(1), 60, 1996 |
| 3 |
Dry-Etching of Palladium Thin-Films in Fluorine-Containing Plasmas - X-Ray Photoelectron-Spectroscopy Investigation Fracassi F, Dagostino R, Cacucci A Journal of Vacuum Science & Technology A, 13(1), 63, 1995 |
| 4 |
Dry-Etching of Titanium Nitride Thin-Films in CF4-O-2 Plasmas Fracassi F, Dagostino R, Lamendola R, Mangieri I Journal of Vacuum Science & Technology A, 13(2), 335, 1995 |
| 5 |
Plasma-Assisted Deposition of Tungsten-Containing Siloxane Thin-Films Fracassi F, Dagostino R, Palumbo F, Bellucci F, Monetta T Thin Solid Films, 264(1), 40, 1995 |
| 6 |
Plasma Deposition of Thin-Films from a Fluorine-Containing Cyclosiloxane Favia P, Caporiccio G, Dagostino R Journal of Polymer Science Part A: Polymer Chemistry, 32(1), 121, 1994 |
| 7 |
Fluorinated Diamond-Like Carbon-Films Deposits from Radiofrequency Glow-Discharge in a Triode Reactor Dagostino R, Lamendola R, Favia P, Giquel A Journal of Vacuum Science & Technology A, 12(2), 308, 1994 |