검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
In situ gas-phase FTIR monitoring of liquid delivery MOCVD process for PZT film preparation Funakubo H, Asano G, Tonari K, Takamatsu Y, Ohtsuki K, Satake T Chemical Engineering Journal, 135(1-2), 10, 2008 |
| 2 |
Conformality of Pb(Zr, Ti)O-3 films deposited on trench structures having submicrometer diameter and various aspect ratios Nagai A, Minamidate J, Asano G, Choi CJ, Cho CR, Park Y, Funakubo H Electrochemical and Solid State Letters, 9(1), C15, 2006 |
| 3 |
In situ FTIR investigation of the effect of gas-phase reaction on the deposition of Pb(ZrTi)O-3 films by MOCVD Asano G, Satake T, Ohtsuki K, Funakubo H Thin Solid Films, 498(1-2), 277, 2006 |
| 4 |
Effect of solvent on MOCVD of Pb(Zr, Ti)O-3 films with liquid-delivery source supply method Funakubo H, Asano G, Ozeki T, Machida H, Yoneyama T, Takamatsu Y Journal of the Electrochemical Society, 151(7), C463, 2004 |