We investigated the effect of a solvent on the metallorganic chemical vapor deposition (MOCVD) of Pb(Zr, Ti)O-3 (PZT) films by comparing conventional bubbling and sublimation delivery methods with one using liquid delivery where the source materials were dissolved in a solvent and vaporized in separate vaporizers. A Pb(C11H19O2)(2)-Zr(O.t-C4H9)(4)-Ti(O.i-C3H7)(4)-O-2 system was used as the source, while C8H18 was used as the solvent together with C4H8O. The deposition rates of all constituent oxides decreased with the liquid-delivery method. Moreover, the process window to obtain stoichiometric PZT films [Pb/(Pb + Zr + Ti) = 0.5], irrespective of the supply rate of the Pb source, was diminished with the liquid delivery method, suggesting the contribution of the solvent on the deposition mechanism of PZT film. These phenomena were observed not only with C8H18 but also when C4H8O was used as a solvent. (C) 2004 The Electrochemical Society.