| 학회 |
한국재료학회 |
| 학술대회 |
2020년 가을 (11/18 ~ 11/20, 휘닉스 제주 섭지코지) |
| 권호 |
26권 1호 |
| 발표분야 |
E. 환경/센서 재료 분과 |
| 제목 |
Fabrication of hydrogen gas sensor using ZnO grown by metal-organic chemical vapor deposition |
| 초록 |
Recently, the development of nanostructured materials has resulted in enhanced gas sensing performances as compared to bulk materials due to their superior qualities like large surface area to volume ratio. Among metal oxide-based sensors, zinc oxide (ZnO) sensors are one of the most qualified candidates for detecting explosive gases. We report the synthesis of pristine ZnO nanostructures for hydrogen detecting. ZnO nanostructures were fabricated using metal-organic vapor chemical vapor deposition (MOCVD) followed by electrode evaporation and rapid thermal annealing (RTA). Morphology and chemical composition of ZnO nanostructures has been figured by scanning electron microscopy (SEM) and energy dispersive x-ray spectrometer (EDS). And the gas sensing properties of nanostructured ZnO towards hydrogen too. There are many ways to enhance the sensitivity, speed(response and recovery time), selectivity and stability of nanostructured metal oxide sensor. Our research for finding better hydrogen sensor will go on. |
| 저자 |
심규연, 정우섭, 조승희, 안민주, 강성호, 김효종, 변동진
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| 소속 |
고려대 |
| 키워드 |
ZnO; hydrogen; sensor; MOCVD
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| E-Mail |
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