화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2008년 봄 (04/23 ~ 04/25, 제주ICC)
권호 14권 1호, p.1252
발표분야 재료
제목 Electrical properties of ZnO nanowires based field effect transistors fabricated by top-gate and back-gate approaches
초록 A comparison between the electrical properties of ZnO nanowire based field effect transistors fabricated by top-gate and back-gate approaches has been presented in this paper. The field-effect transistors were fabricated by electron-beam lithography and photolithography process using ZnO nanowires grown by thermal evaporation process. The electrical properties of the fabricated ZnO nanowire based FETs were examined by Vds-Ids and Vgs-Ids measurements. A good contact between ZnO nanowires and Ti/Au metal electrodes was achieved for the fabricated FETs. It was observed that the peak transconductance for the fabricated top-gate ZnO FETs was 162 ns while the peak transconductance for the back-gate based ZnO FETs was 92 ns. The field effect mobilities (µeff) for the top gated and back gated based ZnO nanowires FETs were 72 and 7.1 cm2/V-s, respectively. Our approaches present that the top-gate ZnO nanowires FETs have good electrical characteristics as compared to the back-gated ZnO nanowires FETs.
저자 박용규, Umar Ahmad, 김상훈, 김진석, 모하메드바즘, 한윤봉
소속 전북대
키워드 ZnO nanowires; Field effect transistors (FETs)
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