High-efficiency compression gratings based on total internal reflection (TIR) are promising alternatives of compressor gratings because of their high diffraction efficiency, potential high damage resistant ability, and compact structure. Dependence of the -1 order diffraction efficiencies on grating parameters is analyzed for TE- and TM-polarized incident light of 1053 nm at Littrow angle, which is calculated by using the rigorous coupled-wave analysis. A more intuitional view on the relation is offered through three-dimensional slicing figures instead of two-dimensional ones. The performances of high-efficiency gratings are compared and regarded as criteria for further choices, including spectral bandwidth, angle bandwidth, dispersion, and intensity distribution. For TE- and TM-irradiations, similar spectral bandwidth and angle bandwidth can be achieved by different grating parameters. However, the computer simulation result on the intensity distributions of the two polarized waves shows that such design should be used under the illumination of TE-polarized wave for lower intensity enhancement ratio, which is an important factor related to the gratings' damage threshold. (C) 2010 Elsevier B.V. All rights reserved.