Journal of Vacuum Science & Technology A, Vol.26, No.5, 1355-1356, 2008
Bayard-Alpert ionization gauge sensitivity for C7F14
Various empirical methods are applied to estimate the Bayard-Alpert ionization gauge relative sensitivity for C7F14. These values are compared to a measured value obtained by calibrating the ion gauge tube pressure sensor against a capacitance manometer. (C) 2008 American Vacuum Society.