화학공학소재연구정보센터
Journal of Crystal Growth, Vol.311, No.22, 4647-4651, 2009
Study of the metastable region in the growth of GaN using the Na flux method
it was revealed that the metastable region, in which liquid phase epitaxy (LPE) of GaN single crystals proceeds without the generation of polycrystals, expands with growth temperature in the Na flux method. The metastable region appears when LPE growth proceeds at temperatures above 1073 K, although generation of polycrystals inevitably occurs on a crucible at temperatures less than 1073 K. The highest growth rate of 14 mu m/h in a small experimental setup was achieved at a temperature of 1163 K with a nitrogen pressure of 5.5 MPa due to complete suppression of the growth of polycrystals on a crucible, even though the supersaturation at this condition reached a fairly high level. Also, an LPE crystal with a flat surface could easily be obtained under high-temperature conditions. (C) 2009 Elsevier B.V. All rights reserved.