ArF excimer laser radiation on Si surface at controlled SF6 atmosphere creates a microstructure whose alteration at various UV doses and SF6 pressures are investigated in this work. Moreover, a rigorous model has been presented here regarding the experiments based on the micro-fluid mechanical properties of molten silicon layer and the subsequent mechanical wave resonance due to the surface shallow fluid theory. The competitive thermal and non-thermal UV laser interaction with Si and the following heat transfer explains the creation of the self-assembled micro-pillars on Si surface. (C) 2008 Elsevier B. V. All rights reserved.