Contacts of carbon nanotubes to the prefabricated metal electrodes are improved by field evaporation of metals from a tip of an atomic force microscope such as soldering and/or the thermal treatment. The resultant contact resistance is as good as similar to 100 k Omega with nanoscale Au dots on Au electrodes, similar to the result of thermal treatment of the device. The contact resistance is found to be lower with Au dots than with Ni or Al dots. This method can be applied to local soldering of nanowires and nanotubes to the metal electrodes. (c) 2007 American Vacuum Society.