Thin films of europium silicates were fabricated on Si(100) substrates by a reactive radio-frequency magnetron sputtering method. X-ray photoelectron spectroscopy and X-ray diffraction spectroscopy showed that europium silicates are formed in the films. Electroluminescent devices based on the europium silicate luminescent layer exhibit uniform intense, broad band electroluminescence with an external quantum efficiency of about 0.1% at room temperature.