We investigated the morphological, structural and electronic properties of Pentacene thin films grown by vacuum thermal evaporation on different inert substrates at room temperature. The results of our AFM and STM analysis give an interplanar spacing of 1.54 nm corresponding to the (0 0 1) distance of the so-called "thin film phase". The STS measurements show an HOMO-LUMO gap of 2.2 eV. (c) 2005 Elsevier B.V. All rights reserved.