A metal insulator silicon carbide field effect transistor (MISiC-FET) sensor with a catalytic metal gate is currently under development for detecting the lambda value, or air-to-fuel ratio, of gasoline exhausts. It has been noticed that a change from a low to a high signal level of the sensor occurs at a lambda value above 1.00, which is an oxidizing atmosphere. The exact location of the switch point depends both on the kind of gas and gas concentrations chosen to obtain a specific lambda value. The switch point would rather have been expected at 1.00, which is at stoichiometry, irrespective of the composition of the gas mixture. The origin of this phenomenon is studied here by exposing the sensor to lambda stairs while changing different operating parameters. An increase in catalytic activity has been observed to move the switch point of the device towards a lambda value of 1.00. A similar effect is achieved when decreasing the flow or increasing the temperature of operation of the device. The behavior is explained through the introduction of mass transport limitations in the measurement cell, and the difference in diffusion constants and sticking coefficients among the gases when reaction limitation prevails. (c) 2005 Elsevier B.V. All rights reserved.