Large-sized and thin-filmed lithium ion rechargeable batteries composed of a Li2-xMn2O4 positive electrode, a V2O5 negative electrode and a Li3PO4-xNx electrolyte have been developed on glass substrates by using a sputtering method, and their electrochemical characteristics were investigated. A typical cell size of the batteries was 100 mm x 100 mm in area and about 3.1 mu m in thickness as a whole. The battery with a maximum cell size of 200 nun x 200 mm was also successfully fabricated. These pinhole-free batteries showed a good rechargeable performance between 3.5 and 0.3 V with a typical charge-discharge capacity of about 0.9 mAh for the battery with a 100 mm x 100 nun size and of about 5.5 mAh for the battery with a 200 mm x 200 mm size. These batteries having almost the same characteristics have stably been fabricated with a good yield rate, and they could drive a digital watch as one of realistic portable devices more than I month with only one time charge. (c) 2005 Elsevier B.V. All rights reserved.