화학공학소재연구정보센터
Thin Solid Films, Vol.411, No.1, 32-35, 2002
Electrical properties of crystalline ITO films prepared at room temperature by pulsed laser deposition on plastic substrates
Electrical properties of crystalline indium-tin-oxide (ITO) films, which were grown on polycarbonate (PC) substrates at room temperature by pulsed laser deposition (PLD) with in situ laser irradiation onto the substrates, were studied. The PC substrates were colored by in situ laser irradiation when the ITO films were prepared on the substrates directly, and the resistivity of the ITO films was extremely high. While the PC substrates were prevented from coloring by pre-deposition of CeO2 film, the resistivity was still high. The introduction of a thin Al2O3 layer between the PC substrate and CeO2 film resulted in marked decreasing of the resistivity of the ITO film.