화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.18, No.2, 1044-1047, 2000
Noise characteristics of emission current from conductive diamond-like carbon thin films coating on cone shaped silicon field emitters
Electron emission properties and noise characteristics of emission current from the conductive diamond-like carbon (DLC) thin films, coated on cone shaped Si field emitters, were investigated. The effective work function of the emitters coated by DLC thin films was found to decrease as the conductivity of the DLC film increases. To coat the DLC film, the emission current fluctuation is decreased, but the fluctuation is not influenced by the conductivity of the DLC film. Flicker noise of the field emission current from these emitters was analyzed using fast Fourier transform. It was found that the noise power density of the DLC coated emitters is about 10 dB lower than that of Si field emitters and the Bicker noise of the DLC coated field emitters is not influenced by the ambient pressure.