화학공학소재연구정보센터
Thin Solid Films, Vol.383, No.1-2, 45-47, 2001
A combined TEM and time-resolved optical reflectivity investigation into the excimer-laser crystallization of a-Si films
Results are presented of cross-sectional transmission-electron microscopy and optical reflectivity investigations into the excimer-laser annealing of a-Si films. It is found that, in the initial stages of the excimer pulse, explosive crystallization leads to small, columnar and defect-rich grains. We discuss the evolution of this microstructure as the laser energy is slowly increased up to and beyond the super-lateral growth regime. We argue that melting along grain boundaries and defects is a crucial step in obtaining large single-crystalline grains.