Thin Solid Films, Vol.366, No.1-2, 8-10, 2000
Brookite-rich titania films made by pulsed laser deposition
Pulsed laser deposition has been used to prepare thin films of TiO2 on silicon and other substrates. X-ray diffraction and Raman scattering results show that brookite is the main phase present in the films. Brookite has not previously been reported for pulsed laser deposited titania thin films.