화학공학소재연구정보센터
Thin Solid Films, Vol.366, No.1-2, 4-7, 2000
Bias voltage dependence of properties for depositing transparent conducting ITO films on flexible substrate
Good transparent conducting indium tin oxide films with good adherence were deposited on water-cooled polypropylene adipate substrate using bias r.f. magnetron sputtering. The films with resistivity as low as 6.3 X 10(-4) Omega cm and transmittance over 80% have been obtained by adjusting the bias voltage. It was observed that the structural, electrical and optical properties of the films depend on the bias voltage applied to substrate table.