Thin Solid Films, Vol.366, No.1-2, 4-7, 2000
Bias voltage dependence of properties for depositing transparent conducting ITO films on flexible substrate
Good transparent conducting indium tin oxide films with good adherence were deposited on water-cooled polypropylene adipate substrate using bias r.f. magnetron sputtering. The films with resistivity as low as 6.3 X 10(-4) Omega cm and transmittance over 80% have been obtained by adjusting the bias voltage. It was observed that the structural, electrical and optical properties of the films depend on the bias voltage applied to substrate table.
Keywords:THIN-FILMS;INDIUM