Thin Pd-films are prepared under UHV-conditions onto quartz and NaCl substrates at various temperatures up to T-s = 670 K. The topography of these films is investigated by in situ STM (Scanning Tunneling Microscope) and the morphology (ex situ) by TEM (Transmission Electron Microscopy). Pd-films condensed onto quartz substrates are polycrystalline as revealed by TEM. The morphology of these films is consistent with their topography as obtained by STM measurements. Pd-films grown onto NaCl at temperatures above 500 K are single crystalline. In contrast to the polycrystalline Pd-films, the surface topography of the single crystalline films is rather different from what the morphology would suggest. We thus propose that for a complete characterization of thin films, both STM and TEM investigations are necessary.