Thin Solid Films, Vol.324, No.1-2, 170-175, 1998
High resolution chemical mapping in the energy-filtering TEM : application to interface layers in ceramics
Image-spectrum EELS (electron energy-loss spectroscopy) consists of acquiring sequences of energy-filtered images of a specimen with an energy-selecting TEM (or an imaging filter in general). A special software was developed for this application and allows the immediate display of an energy-filtered image or an EELS spectrum to be obtained, interactively. The method is able to produce semi-quantitative chemical mapping of elements at a sub-nanometric spatial resolution. This image-spectrum EELS method (called IMEELS) has been implemented on a Zeiss CEM 902 TEM microscope. The applications of this method for materials and biological specimens has already been described elsewhere. This work presents the capabilities of the IMEELS method to produce fast chemical mapping and EELS spectra in thin films interfaces of ceramic materials, with a high spatial resolution and in a shea experimental time (typically a few minutes).
Keywords:IMAGE-SPECTRUM EELS