Silver, calcium fluoride (CaFx with x = 1.85) and chromium-carbon (Cr3C2) thin films have been deposited on various tribological test specimens by sputtering. The friction properties of sputter-deposited Ag and CaFx single layers as well as Ag/CaFx multilayer films were determined by ball-on-disk tribological tests conducted in room air under various experimental conditions. The tribological properties (friction coefficient and wear rate) of sputter-deposited CaFx films were also determined at 500 degrees C by pin-on-disk tribological tests performed with pin specimens made of cobalt-based alloy (alacrite). Chromium-carbon films sputter-deposited on alacrite disk and counterfaces were found to be of interest to reduce the formation of alacrite wear debris in the wear tracks whereby reduced friction coefficient and wear rate values were obtained. The friction behavior of sputter-deposited CaFx/Cr3C2 thin bilayer structures was also investigated by plane-on-plane tribological tests conducted in room air at 500 degrees C and 700 degrees C.