화학공학소재연구정보센터
Thin Solid Films, Vol.304, No.1-2, 212-221, 1997
Growth Phenomena of Bi2Sr2Cacu2O8+delta Thin-Films Deposited on (110)-Oriented SrTiO3 Substrates
Thin films of Bi2Sr2CaCu2O8+delta have been deposited on (110) oriented SrTiO3 substrates by inverted cylindrical magnetron sputtering. In structural studies, two competing growth orientations have been observed : domains with the c-axis oriented perpendicular to the substrate surface and inclined domains with the c-asis almost parallel to the [100](S) and [010](S) directions of the substrate. For both growth orientations, in-plane alignment within the (110)(S) plane has been achieved. Domains of the different growth orientations are clearly reflected in the surface morphology of the films.