화학공학소재연구정보센터
Thin Solid Films, Vol.240, No.1-2, 92-96, 1994
Surface Physical and Chemical-Changes of Pure Iron After Molybdenum Ion-Implantation and Their Effects on the Tribological Behavior .1. Physical and Chemical-Analysis
Molybdenum ions generated by a metal vapour vacuum arc (MEVVA) ion source were implanted into pure iron at doses of 1 x 10(17) and 3 x 10(17) ions cm-1 with an extraction voltage of 45 kV. Auger electron spectroscopy (AES) sputtering depth profiles, X-ray photoelectron spectroscopy (XPS) analysis, X-ray diffraction (XRD) analysis, microhardness and the residual stress of the implanted specimen were studied. The results show that molybdenum atoms exist in the implanted layer at a maximum concentration 20 at.%. A new phase (Fe3C) is formed in the specimens implanted higher doses due to carbon incorporation during sputtering of the natural oxide film from the implanted surface. The Fe2Mo phase is formed in both dose regimes. Residual compressive stresses of 310 and 560 MPa were measured on the surfaces of the specimens after molybdenum ion implantation at 1 x 10(17) and 3 x 10(17) ions/cm2 respectively due to a local expansion of the lattice in the near-surface region. Due to the existence of residual compressive stress and the formation of the new phases, the microhardness of pure iron specimens was increased from 264 to 325 and 333 kgf mm-2 by molybdenum ion implantation at 1 x 10(17) and 3 x 10(17) ions cm-2 respectively.