Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.3, 895-901, 1995 DOI10.1116/1.588202 Export Citation Optimization of Reactive Ion Etching of Al0.48In0.52As in CH4/H-2 by the Experimental-Design Method Carpi EL, Vanhove M, Alay JL, Vanrossum M Keywords:INP Please enable JavaScript to view the comments powered by Disqus.
