Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.2, 209-213, 1995 DOI10.1116/1.587999 Export Citation Grain-Growth in Copper-Films Exposed to Magnetically Enhanced Plasmas Naeem MD, Rossnagel SM, Rajan K Keywords:THIN-FILMS;DEPOSITION Please enable JavaScript to view the comments powered by Disqus.
