Journal of Vacuum Science & Technology B, Vol.12, No.6, 3533-3538, 1994
Experimental Investigation of Stochastic Space-Charge Effects on Pattern Resolution in Ion Projection Lithography Systems
Hammel E,
Chalupka A,
Fegerl J,
Fischer R,
Lammer G,
Loschner H,
Malek L,
Nowak R,
Stengl G,
Vonach H,
Wolf P,
Brunger WH,
Buchmann LM,
Torkler M,
Cekan E,
Fallmann W,
Paschke F,
Stangl G,
Thalinger F,
Berry IL,
Harriott LR,
Finkelstein W,
Hill RW
