Journal of Vacuum Science & Technology A, Vol.13, No.3, 1658-1664, 1995
Deposition and Modification of Titanium Nitride by Ion-Assisted Are Deposition
Keywords:FILTERED ARC EVAPORATION;THIN-FILMS;ELASTIC-CONSTANTS;BOMBARDMENT;TIN;COATINGS;GROWTH;STRESS;MICROSTRUCTURE;ORIENTATION