Journal of Vacuum Science & Technology A, Vol.13, No.3, 1649-1657, 1995
Energetic Condensation - Processes, Properties, and Products
Keywords:ION-ASSISTED DEPOSITION;THIN-FILM DEPOSITION;BEAM DEPOSITION;CHEMICAL-PROPERTIES;SPUTTERING SYSTEMS;TIN FILMS;GROWTH;BOMBARDMENT;COATINGS;MICROSTRUCTURE