Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1633-1638, 1995 DOI10.1116/1.579743 Export Citation Auger-Electron Spectroscopy X-Ray Photoelectron-Spectroscopy Study of Ti-B-N Thin-Films Baker MA, Steiner A, Haupt J, Gissler W Keywords:COATINGS;DEPOSITION Please enable JavaScript to view the comments powered by Disqus.
