Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1628-1632, 1995 DOI10.1116/1.579742 Export Citation Carbon Dimer, C-2 as a Growth Species for Diamond Films from Methane/Hydrogen/Argon Microwave Plasmas Gruen DM, Zuiker CD, Krauss AR, Pan XZ Keywords:CHEMICAL-VAPOR-DEPOSITION;SURFACE;SCATTERING;CHEMISTRY;HYDROGEN Please enable JavaScript to view the comments powered by Disqus.
