Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1104-1110, 1995 DOI10.1116/1.579594 Export Citation Structure and Composition of Hydrogenated Tixcy Thin-Films Prepared by Reactive Sputtering Delplancke MP, Vassileris V, Winand R Keywords:TITANIUM CARBIDE;CARBON-FIBERS;LASER CVD;MECHANISMS;NITRIDE;MOLYBDENUM;COATINGS;TIN Please enable JavaScript to view the comments powered by Disqus.
