Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1100-1103, 1995 DOI10.1116/1.579593 Export Citation Oxygen-Content of Indium Tin Oxide-Films Fabricated by Reactive Sputtering Honda S, Tsujimoto A, Watamori M, Oura K Please enable JavaScript to view the comments powered by Disqus.
