Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 918-926, 1995 Export Citation Spatiotemporal Powder Formation and Trapping in Radio-Frequency Silane Plasmas Using 2-Dimensional Polarization-Sensitive Laser Scattering Dorier JL, Hollenstein C, Howling AA Keywords:LOW-PRESSURE DISCHARGES;GLOW-DISCHARGES;DUST PARTICLES;PARTICULATE;SIMULATION Please enable JavaScript to view the comments powered by Disqus.
