A comprehensive, two-dimensional, self-consistent model was developed and used to simulate chemical vapor infiltration of fiber-reinforced composite materials with radio frequency heating. The model included equations for energy transport, multicomponent mass transport, and pore structure evolution, coupled to Maxwell’s equations to determine self-consistently the power absorbed by the preform from a radio frequency induction coil. The model equations were solved by a finite element method to study carbon chemical vapor infiltration in a cylindrical carbon preform. Simulations for a constant absorbed power showed that densification of the preform proceeds in an "inside out" manner, first in the radial direction and subsequently in the axial direction, for the aspect ratio studied. The power density distribution in the preform evolves in a complex manner as densified regions absorb more energy with increased densification. This may result in thermal runaway during the infiltration process and entrapment of porosity in the interior of the preform. Comparison of simulated results with reported experimental data showed semiquantitative agreement of important trends. A more accurate description of material properties is required for a quantitative match with the data.