Optical Emission Spectroscopy (OES) was used to identify reactive species and their excitation states in low-temperature cascade are plasmas of N-2, CF4, C2F4, CH4, and CH3OH. In a cascade are plasma, the plasma gas (argon or helium) was excited in the cascade are generator and injected into a reactor in vacuum. A reactive gas was injected into the cascade are torch (CAT) that was expanding in the reactor. What kind of species of a reactive gas, for example, nitrogen, are created in the reactor is dependent on the electronic energy levels of the plasma gas in the cascade are plasma jet. OES revealed that no ion of nitrogen was found when argon was used as the plasma gas of which metastable species had energy less than the ionization energy of nitrogen. When helium was used, ions of nitrogen were found. While OES is a powerful tool to identify the products of the cascade are generation (activation process), it is less useful to identify the reactive species that are responsible for surface modification of polymers and also for plasma polymerization. The plasma surface modification and plasma polymerization are deactivation processes that cannot be identified by photoemission, which is also a deactivation process.