One of the most attractive structural features of titanium (Ti) alloys is its alpha + beta dual-phase growth. Previous work focused on alpha- or beta-Ti phase films, but dual-phase growth in films has not yet been studied. This paper investigates the magnetron-sputtered structures of Ti-5Al-2Sn-2Zr-4Mo-4Cr alloy as a function of substrate temperature from 125 degrees C to 530 degrees C. The film shows a phase transformation from single beta to alpha + beta growth as substrate temperature rises. We discuss the morphology and texture evolutions that arise in sputtering deposition in reference to the structure zone model. We use nanoindentation to assess the mechanical properties of the films. The phase evolution, zone 1-zone T transition, and texture growth with the increasing substrate temperature all contribute to mechanical property improvements of the films. (C) 2017 Elsevier B.V. All rights reserved.