Korean Journal of Materials Research, Vol.9, No.8, 782-786, August, 1999
열처리한 CdS 박막의 구조변환에 관한 연구
A Study on the Phase Transition of Heat-Treated CdS Thin Films
초록
진공증착법으로 CdS 박막을 제작하여 열처리한 시료를 상온에서 SEM, XRD, EDX와 PL 특성을 측정하여 50 ? C와450 ? C 사이에서 cubic to hexagonal phase transition을 확인하였다. 열처리 결과 S-빈자리에 O 2 와 Si불순물이 보상되어 CdO 또는 Cd 2 SiO 4 주개준위(donor level)를 만드는데 광발광 측정에서 열처리온도 350 ? C 에서는 2.34eV, 550 ? C 는 2.42eV에서 EE 피이크를 나타내었다. 이러한 특성결과 본 연구에서 결정구조변환 온도는 370?C 를 나타내었으며 Ariza-Calderon 등의 CBD박막에 대한 결과인 374 ? C 와 유사한 것으로 확인되었다.
CdS thin films prepared by vaccum evaperation have been studied the characteristcs of room temperature of scanning electron microscoe(SEM), X-ray diffraction(XRD), energy dispersive X-ray(EDX), and photoluminescence(PL)spectra. The cubic to hexagonal structure phase transitin has been determined to be 350 ? C 450 ? C . The results of compensated donor levels of O 2 and Si impurites at S-vacancy were identified CdO and Cd 2 SiO 4 defects. The edge emission peaks measured by PL of room temperature was donor level accoding the theses O 2 and Si impurites were due to 2.43eV( 350 ? C ) and 2.42eV(55 0 ? C ) peak energies respectively. The structure transition annealing temperature was measured 370 ? C similar to Ariza-Calderons result, 374 ? C by CBD films.
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