알루미나 나노템플레이트의 기공형성에 미치는 2차 양극산화의 영향

조수행; 오한준; 주은균; 유창우; 지충수; S.H. Cho; H.J. Oh; E.K. Joo; C.W. Yoo; C.S. Chi

Korean Journal of Materials Research, Vol.12, No.7, 533-539, July, 2002

DOI10.3740/MRSK.2002.12.7.533 Export Citation

알루미나 나노템플레이트의 기공형성에 미치는 2차 양극산화의 영향

Effect of 2nd Anodization on the Pore Formation for Alumina Nano Templates

조수행, 오한준 ¹, 주은균, 유창우, 지충수 ^†

국민대학교 금속재료공학부
¹한서대학교 재료공학과

S.H. Cho, H.J. Oh¹, E.K. Joo, C.W. Yoo, and C.S. Chi^†

School of Advanced Materials Engineering, Kookmin University, Seoul 136-702, Korea
¹Dept. of Materials Engineering, Hanseo University, Seosan, 352-820, Korea

E-mail:

Porous anodic aluminum oxide layer for nano templates was prepared in acidic solutions. In order to investigate effects of 2nd anodization on ordered formation behaviors of the porous oxide layers, electrochemical and microstructural studies were performed, primarily using TEM, FE- SEM, AFM, and Ultramicrotomy. The pore diameter of the anodic oxide layer increased approximately linearly with increasing voltages, and to the contrary, the pore density decreased. It was shown that 2nd anodizing on the cell base after dissolving 1st anodic oxide layer was remarkably effective for forming ordered array of the pores, comparing with the case for 1st anodization only. And for controlling the diameter of pores, widening method by chemical dissolution seemed more practical than by electrochemical methods.

Keywords:nano template;porous alumina;second anodizing;widening

[References]

Keller F, Hunter MS, Robinson DL, J. Electrochem. Soc., 100, 411 (1953)
Furneaux RG, Rigby WR, Davidson AP, Nature, 337, 147 (1989)
Masuda H, Satoh M, Jpn. J. Appl. Phys, 35, 1126 (1996)
Itaya K, Sugawara S, Arai K, Saito S, J. Chem. Eng. Jpn, 17, 512 (1984)
Martin CR, Chem. Mater., 9, 2544 (1997)
Stucky GD, MacDougall JE, Science, 247, 669 (1990)
Tonucci RJ, Justus BL, Carnpillo AJ, Ford CE, Science, 258, 783 (1992)
Martin CR, Science, 266(5193), 1961 (1994)
Serbrennikova I, Vanvsek P, Birss VI, Electrochim. Acta, 42, 146 (1997)
Masuda H, Fukuda K, Science, 268(5216), 1466 (1995)
Li Y, Shimada H, Sakairi M, Shigyo K, Takahashi H, Seo M, J. Electrochem. Soc., 144(3), 866 (1997)
Habazaki H, Skeldon P, Thompson GE, Wood GC, Philos. Mag, 73, 297 (1996)
Park GS, Bull. Kor. Inst. Met. Mat., 9, 589 (1996)
Masuda H, Nishio K, Baba N, Thin Solid Films, 223, 1 (1993)
Masuda H, Hasegwa F, J. Electrochem. Soc., 144, 5 (1997)

[Referenced By]

[Related Articles]

[1] Keller F, Hunter MS, Robinson DL, J. Electrochem. Soc., 100, 411 (1953)

[2] Furneaux RG, Rigby WR, Davidson AP, Nature, 337, 147 (1989)

[3] Masuda H, Satoh M, Jpn. J. Appl. Phys, 35, 1126 (1996)

[4] Itaya K, Sugawara S, Arai K, Saito S, J. Chem. Eng. Jpn, 17, 512 (1984)

[5] Martin CR, Chem. Mater., 9, 2544 (1997)

[6] Stucky GD, MacDougall JE, Science, 247, 669 (1990)

[7] Tonucci RJ, Justus BL, Carnpillo AJ, Ford CE, Science, 258, 783 (1992)

[8] Martin CR, Science, 266(5193), 1961 (1994)

[9] Serbrennikova I, Vanvsek P, Birss VI, Electrochim. Acta, 42, 146 (1997)

[10] Masuda H, Fukuda K, Science, 268(5216), 1466 (1995)

[11] Li Y, Shimada H, Sakairi M, Shigyo K, Takahashi H, Seo M, J. Electrochem. Soc., 144(3), 866 (1997)

[12] Habazaki H, Skeldon P, Thompson GE, Wood GC, Philos. Mag, 73, 297 (1996)

[13] Park GS, Bull. Kor. Inst. Met. Mat., 9, 589 (1996)

[14] Masuda H, Nishio K, Baba N, Thin Solid Films, 223, 1 (1993)

[15] Masuda H, Hasegwa F, J. Electrochem. Soc., 144, 5 (1997)