GaN/사파이어 구조에서의 표면탄성파 전단특성

최국현; 김진용; 김형준; 정수진; 이태근; 김영진; Kook Hyun Choi; Jin Yong Kim; Hyeong Joon Kim; Su Jin Chung; Tae Kun Lee; Young Jin Kim

Korean Journal of Materials Research, Vol.12, No.7, 522-527, July, 2002

DOI10.3740/MRSK.2002.12.7.522 Export Citation

GaN/사파이어 구조에서의 표면탄성파 전단특성

SAW Propagation Properties of GaN/Sapphire Structure

최국현, 김진용¹, 김형준, 정수진, 이태근 ², 김영진 ^{3, †}

서울대학교 공과대학 재료공학부
¹NIST
²서울산업대학교 재료공학과
³경기대학교 첨단산업공학부 신소재전공

Kook Hyun Choi, Jin Yong Kim¹, Hyeong Joon Kim, Su Jin Chung, Tae Kun Lee², and Young Jin Kim^{3, †}

School of Materials Science and Engineering, Seoul National University, Seoul 151-742, Korea
¹Film Characterization and Properties Group Ceramics Division, NIST, Gaitherburg, MD, USA
²Department of Materials Science and Engineering, Seoul National University of Technology, Seoul 131-743, Korea
³Department of Materials Science and Engineering, Kyonggi University, Suwon 442-760, Korea

E-mail:

To investigate the SAW properties of GaN films on c-plane sapphire substrates, we carried out both the experimental measuring and theoretical calculation. The experimental characterization of SAW propagation properties was performed with a linear array of interdigital transducer (IDT) structures, while SAW velocities were calculated by matrix methods. HVPSAW mode with the propagation velocity over 10,000m/s and PSAW mode as well as GSAW could be observed in experimental determination. These results were verified by matching with the theoretical calculation.

Keywords:GaN;SAW;Piezoelectricity;HVPSAW;PSAW

[References]

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Polian A, Grimditch M, Grzegory I, J. Appl. Phys., 79, 3343 (1996)
Schwarz RB, Khachataryan K, Weber RE, Appl. Phys. Lett., 70, 1122 (1997)
Deger C, Born E, Angerer H, Ambacher O, Stutzmann M, Hormstein J, Riha E, Fischeruer G, Appl. Phys. Lett., 72, 2400 (1998)
Yamaguchi M, Yagi T, Azuhata T, Sato T, Suzuki K, Chichibu S, Nakamura S, J. Appl. Phys., 86, 1860 (1999)
Deduchi T, Ichiryu D, Toshikawa K, Sekiguchi K, Sato T, Matsuo R, Azuhata T, Yamaguchi M, Yagi T, Chichibu S, Nakamura S, J. Appl. Phys., 86, 1860 (1999)
Kim K, Lambrecht WRL, Segall B, Phys. Rev. B, 53, 16310 (1996)
Kim K, Lambrecht WRL, Segall B, Phys. Rev. B, 53, 7018 (1997)
Wright AF, J. Appl. Phys., 82, 2833 (1997)
Shimada K, Sato T, Suzuki K, J. Appl. Phys., 84, 4951 (1998)

[Related Articles]

[1] Nakahata H, Higaki K, Hachico A, Shikata S, Fujimori N, Takahashi Y, Kajihara T, Yamamoto Y, Jpn. J. Appl. Phys., 33(1A), 324 (1994)

[2] O'Clock GD, Duffy MT, Appl. Physic. Lett., 23, 55 (1973)

[3] Didenko IS, Hickernell FS, Naumenko NF, IEEE Trans. Ultrason. Ferroelectr. Freq. Contr., 47, 179 (2000)

[4] White RM, Surface Elastic Wave, Proc IEEE, 58(8), 1238 (1970)

[5] Makarov S, Chilla E, Frohlich HJ, Frohlich HJ, 78(8), 5028 (1995)

[6] Farnell GW, Adler EL, 'Elastic Wave Propagation in Thin Layers', edited by Thurston RN, Mason WP, in Physical Acoustics, Volume IX(Academic, New York, 1972), pp.35-127 (1972)

[7] Adler EL, et al., 'PC Software for SAW Propagation in Anisotropic Multilayers,' IEEE Ultrason, Ferr. and Freq., vol.37, no.2, pp.215-222

[8] Polian A, Grimditch M, Grzegory I, J. Appl. Phys., 79, 3343 (1996)

[9] Schwarz RB, Khachataryan K, Weber RE, Appl. Phys. Lett., 70, 1122 (1997)

[10] Deger C, Born E, Angerer H, Ambacher O, Stutzmann M, Hormstein J, Riha E, Fischeruer G, Appl. Phys. Lett., 72, 2400 (1998)

[11] Yamaguchi M, Yagi T, Azuhata T, Sato T, Suzuki K, Chichibu S, Nakamura S, J. Appl. Phys., 86, 1860 (1999)

[12] Deduchi T, Ichiryu D, Toshikawa K, Sekiguchi K, Sato T, Matsuo R, Azuhata T, Yamaguchi M, Yagi T, Chichibu S, Nakamura S, J. Appl. Phys., 86, 1860 (1999)

[13] Kim K, Lambrecht WRL, Segall B, Phys. Rev. B, 53, 16310 (1996)

[14] Kim K, Lambrecht WRL, Segall B, Phys. Rev. B, 53, 7018 (1997)

[15] Wright AF, J. Appl. Phys., 82, 2833 (1997)

[16] Shimada K, Sato T, Suzuki K, J. Appl. Phys., 84, 4951 (1998)