Materials Science Forum, Vol.457-460, 787-790, 2004
Analysis of different vanadium charge states in vanadium doped 6H-SiC by low temperature optical absorption and electron paramagnetic resonance
Optical absorption and electron paramagnetic resonance (EPR) measurements were used to determine the presence of different vanadium charge states and to estimate their respective concentrations. Absorption peaks attributed to V3+ and V4+, intra 3d-shell transitions, respectively, as well as V3+ and V4+ hyperfine octets were measured in samples cut from a vanadium doped and a vanadium/boron co-doped crystal. Results were compared to chemical analysis and electrical measurements. As a result, the V3+ and V4+ features were found to correlate with the respective concentration of vanadium in different charge states.