Materials Science Forum, Vol.433-4, 979-982, 2002
Growth of AlN bulk crystals by sublimation sandwich method
We report on new results in AlN bulk crystal growth by sublimation sandwich method. The single crystals of 12 mm in diameter and up to 5 min long have been obtained with the growth rate up to 0.5 min/h. Growth was carried out in a nitrogen environment at temperatures of 1900-2300degreesC and atmospheric pressure. 4H- and 6H-SiC both of (0001)C and (0001)Si orientations were used as seeds. Growth kinetics and operating conditions favorable for improving the long-term process stability and crystal quality are discussed on the basis of both experimental and theoretical studies. The grown AlN crystals are characterized by X-ray diffraction and Raman scattering.