화학공학소재연구정보센터
Thin Solid Films, Vol.519, No.21, 7458-7463, 2011
Rocking disc electro-deposition of copper films on Mo/MoSe2 substrates
A novel electro-deposition method based on a rocking disc system with pi/3 amplitude and variable frequency is introduced. Uniform copper films were deposited from a 0.1 M CuSO4/3.0 M NaOH/0.2 M sorbitol bath directly onto 12.1 cm(2) Mo/MoSe2 substrates with X-ray diffraction showing a thickness variation of +/- 5% over this area. Investigation of the mass transport conditions suggests (i) uniform diffusion over the sample, (ii) a rate of mass transport proportional to the square root of the rocking rate, and (iii) turbulent conditions, which are able to dislodge gas bubbles during electro-deposition. (C) 2010 Elsevier B.V. All rights reserved.