A cost-effective and promising simple deposition method, electrostatic spray deposition (ESD), was used to fabricate dense scandium stabilized zirconia (ScSZ) thin films. The effect of solvent mixtures on their surface morphology was investigated. The films deposited using a mixed ethanol-butyl carbitol solvent with high boiling point showed higher smoothness compared with those deposited using ethanol and a mixture of ethanol and ethylene glycol, respectively. Single-phase ScSZ dense films were formed within 2 h at a low deposition temperature of 450 degrees C. Analysis of as heat-treated films using scanning electron microscope and atomic force microscope also indicated the formation of the uniform, smooth and dense thin films even at a low densification temperature. Furthermore, the ScSZ film deposited under the optimal condition showed the maximum in electrical conductivity of approximately 0.33 S cm(-1) at a low operating temperature of 800 degrees C. (C) 2010 Elsevier B.V. All rights reserved.