Molybdenum nitride nanotubes were prepared by depositing nitride film on anodized aluminum oxide (AAO) template by atomic layer deposition and then etching away the template with sodium hydroxide solution. The effect of deposition parameters on film growth and the properties of the nanotubes was investigated. The maximum depth of intrusion of the molybdenum nitride film into the AAO pores was found to be 20 gm, achieved with 7-second precursor pulses. Precursor diffusion into the AAO pores dominated over the intrusion. Three different architectures of molybdenum nitride nanotubes were isolated. Separated nanotubes were found when the template was etched in an ultrasonic bath, while bundling dominated when template etching was conducted without ultrasound. When the nitride-coated AAO template was mounted onto a steel plate before etching the nanotubes remained on the surface with the tips strongly intertwined. (c) 2007 Elsevier B.V. All rights reserved.